Product Description:
The VCAR0105-0164-00A is a high-precision voice coil motor optimized for semiconductor inspection equipment. Combining micro-sized construction, direct-drive high-speed actuation, and nanometer-level positioning, it meets the stringent requirements for speed, accuracy, and stability in modern semiconductor inspection platforms. During wafer inspection, equipment requires rapid, high-precision 3D scanning, and measurement of surface flatness and thickness at nanometer scales. The low-inertia mover and cogging-free design of the VCAR0105-0164-00A allow millisecond-level reciprocating motion while ensuring smooth operation with no vibration or positional error, greatly improving inspection efficiency.
VCAR series motors are also widely applied in lithography machines, scanning inspection systems, micro-positioning stages, and laboratory automation. The compact design allows integration into limited spaces, while lightweight movers and high-frequency response ensure low inertia and high precision even under high-speed scanning loads. Smooth motion minimizes vibration impact, enhancing scan consistency and reliability.
Features:
High-speed and high-acceleration, ideal for rapid scanning
Nanometer-level positioning for accurate measurements
Cogging-free, smooth motion
Compact, micro-sized design for integration
High-frequency response for closed-loop real-time control
Lightweight mover reduces inertia and improves dynamics
Durable for long-term high-frequency operation
Technical Parameters:
| Product Model | Peak Force
(N) | Continuous Force
at 25℃(N) | Total Stroke
(mm) | Max Voltage
(V) | Back EMF Constant
(V/m/s) | Weight of the coil
(g) | Stator Diameter (mm) | The Length
(mm) |
| VCAR0001-0064-00A | 0.88 | 0.28 | 6.4 | 6.9 | 0.29 | 3 | 9.5 | 17.7 |
| VCAR0001-0010-00A | 0.73 | 0.42 | 1 | 4.8 | 0.6 | 2.7 | 24 | 11.2 |
| VCAR00025-0127-00A | 2.55 | 0.81 | 12.7 | 11.6 | 0.77 | .6.6 | 12.7 | 24 |
| VCAR0006-0039-00A | 6.2 | 1.9 | 3.9 | 6.6 | 1.12 | 7.9 | 20 | 17.2 |
| VCAR0006-0050-00A | 6.2 | 2.6 | 5 | 15.7 | 3.57 | 8.2 | 25 | 18.2 |
| VCAR0007-0040-00A | 7.2 | 2.4 | 4 | 7.5 | 1.88 | 7 | 14.2 | 23 |
| VCAR0007-0064-00A | 7.8 | 2.5 | 6.4 | 9.9 | 1.5 | 7.2 | 19.1 | 23.8 |
| VCAR0007-0127-00A | 7.1 | 2.3 | 12.7 | 12.8 | 1.6 | 11.4 | 19.1 | 27 |
| VCAR0011-0050-00A | 11.4 | 2.1 | 5 | 11.8 | 3 | 11.2 | 24 | 17.2 |
| VCAR0011-0100-00A | 10.5 | 2.9 | 10 | 43.8 | 3.5 | 20 | 31 | 26.8 |
| VCAR0013-0030-00A | 13 | 3.5 | 3 | 16 | 3.5 | 12 | 25 | 21 |
| VCAR0013-0072-00A | 13 | 4.2 | 7.2 | 26.6 | 5.72 | 16.2 | 26.2 | 24.7 |
| VCAR0014-0250-00A | 14 | 4.5 | 25 | 26.5 | 3.9 | 35 | 25.4 | 44.2 |
| VCAR0015-0062-00A | 15 | 6.5 | 6.2 | 26.2 | 9.75 | 14.8 | 33 | 25.6 |
| VCAR0022-0098-00A | 22 | 6.6 | 9.8 | 24.7 | 5.8 | 20 | 34.1 | 35 |
| VCAR0022-0448-00A | 22 | 11.4 | 44.8 | 14.3 | 4 | 52 | 48 | 75.7 |
| VCAR0025-0630-00A | 25.3 | 8 | 63 | 50.6 | 5 | 68 | 31.8 | 83.1 |
| VCAR0030-0150-00A | 29.4 | 4.73 | 15 | 40.5 | 7.4 | 27 | 30 | 31 |
| VCAR0032-0050-00A | 32 | 8.9 | 5 | 29.3 | 7.1 | 48 | 40 | 41.7 |
| VCAR0033-0099-00A | 33 | 8 | 9.9 | 24.3 | 5.87 | 23.5 | 36 | 26.7 |
| VCAR0033-0224-00A | 33 | 13.5 | 22.4 | 26.7 | 6.8 | 69 | 58 | 72 |
| VCAR0035-0090-00A | 35 | 11 | 9 | 26.4 | 9 | 33 | 25.4 | 44.3 |
| VCAR0035-0105-00A | 35 | 15.6 | 10.5 | 11.9 | 5 | 91 | 50 | 67 |
| VCAR0044-0040-00A | 44 | 16.3 | 4 | 18.3 | 8.9 | 46.5 | 53 | 21.2 |
| VCAR0044-0059-00A | 44.1 | 17.7 | 5.9 | 14.3 | 8 | 43 | 46 | 22 |
| VCAR0044-0075-00A | 44 | 13.7 | 7.5 | 16.8 | 7.6 | 38.6 | 31.1 | 35.9 |
| VCAR0044-0249-00A | 44 | 11.7 | 24.9 | 44.9 | 8.88 | 65.9 | 38.1 | 51.3 |
| VCAR0070-0149-00A | 70 | 27.3 | 14.9 | 26.9 | 17.7 | 79 | 43 | 53.7 |
| VCAR0075-0200-00A | 75 | 30 | 20 | 26.2 | 15.2 | 65 | 70 | 38.7 |
| VCAR0080-0129-00A | 80 | 35 | 12.9 | 27.7 | 18 | 149 | 49 | 53.8 |
| VCAR0087-0062-00A | 87 | 21.67 | 6.2 | 34.5 | 12.7 | 45.2 | 43.1 | 34.9 |
| VCAR0087-0563-00A | 87 | 17.5 | 56.3 | 63.4 | 8.1 | 177 | 72 | 110 |
| VCAR0105-0164-00A | 105 | 35.4 | 16.1 | 20.1 | 11.5 | 150 | 60.4 | 40.4 |
| VCAR0110-0380-00A | 110 | 37.4 | 38 | 23.2 | 9 | 150 | 60.4 | 60.4 |
| VCAR0113-0089-00A | 113 | 35 | 8.9 | 31 | 17.5 | 125 | 73 | 27.5 |
| VCAR0115-0065-00A | 115 | 30.1 | 6.5 | 35 | 17.3 | 52 | 40 | 58 |
| VCAR0130-0310-00A | 130 | 40 | 31 | 30.4 | 20.5 | 280 | 75.6 | 56.5 |
| VCAR0140-0150-00A | 140 | 42.2 | 15 | 33.4 | 26.6 | 80 | 53 | 53.7 |
| VCAR0210-0254-00A | 210 | 66.2 | 25.4 | 56.6 | 28 | 230 | 43.7 | 111.8 |
| VCAR0262-0112-00A | 262 | 111 | 11.2 | 35.1 | 41 | 285 | 71 | 64 |
| VCAR0262-0249-00A | 262 | 112 | 24.9 | 28.2 | 26 | 785 | 66 | 109.1 |
| VCAR0294-0498-00A | 294 | 56.8 | 49.8 | 114 | 24.5 | 685 | 93 | 136.9 |
| VCAR0436-0187-00A | 436 | 147.6 | 18.7 | 40.7 | 40.7 | 648 | 80.4 | 91 |
| VCAR0436-0250-00A | 436 | 167 | 25 | 31.6 | 37.2 | 775 | 78.4 | 110 |
| VCAR0436-0373-00A | 436 | 142.6 | 37.3 | 38 | 29.8 | 1050 | 76 | 163 |
| VCAR0980-0249-00A | 980 | 605 | 24.9 | 41.5 | 104 | 1426 | 126 | 134.5 |
| VCAR1351-0310-00A | 1351 | 376.8 | 31 | 73.5 | 68 | 1071 | 110 | 143.7 |
Applications:
Semiconductor wafer surface inspection
Lithography machine positioning
High-speed scanning systems
Micro-positioning stages & lab automation
Automated semiconductor production lines
Why Choose VCAR
-
High precision, high speed, and high acceleration
-
Smooth, vibration-free motion ensures reliable inspection
-
OEM / ODM customization for stroke, force, and mounting
-
Supports closed-loop control and precision feedback devices
Product Tags:
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High Speed VCAR Voice Coil Motors For Semiconductor Inspection Applications Images
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